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Microsystems Technologies

Module name (EN): Microsystems Technologies
Degree programme: Neural Engineering, Master, ASPO 01.04.2019
Module code: NE2103.MST
Hours per semester week / Teaching method: 3V+1U (4 hours per week)
ECTS credits: 4
Semester: 1
Mandatory course: yes
Language of instruction:
English
Assessment:
Written exam
Curricular relevance:
NE2103.MST Neural Engineering, Master, ASPO 01.04.2019, semester 1, mandatory course
Workload:
60 class hours (= 45 clock hours) over a 15-week period.
The total student study time is 120 hours (equivalent to 4 ECTS credits).
There are therefore 75 hours available for class preparation and follow-up work and exam preparation.
Recommended prerequisites (modules):
None.
Recommended as prerequisite for:
Module coordinator:
Prof. Dr. Wenmin Qu
Lecturer:
Prof. Dr. Wenmin Qu


[updated 12.03.2020]
Learning outcomes:
Students should have a good understanding of commonly used technologies in microsystems engineering; especially, they should have a good command of the functional principles and associated manufacturing procedures of typical micro components; they can designate the advantages and limitations of the different micro manufacturing techniques and can select suitable solutions for practical applications

[updated 12.03.2020]
Module content:
1. Introduction: markets and applications of Microsystems Technology
 
2. Overview of microfabrication techonologies
2.1 Lithography
2.2 Thin-film techniques
2.3 Bulk- and surface micromachining
2.4 LIGA technology
 
3. Main micro fabrication processes
3.1 Materials of microsystems
3.2 Cleanroom technology and behavior in cleanrooms
3.3 Lithography
3.4 Thin-film process (CVD, PVD; Oxidation)
3.5 Doping
3.6 Etching
3.7 Bonding and Packaging  
 
4. Applications:
4.1 Micro sensors
4.1.1 Temperature sensor
4.1.1 Pressure sensor
4.1.2 Acceleration sensor
4.1.3 Rotation rate sensor
4.1.4 Glucose sensor
 
4.2 Micro Actuators
4.2.1 Micro channels for mixing purpose
4.2.2 Inkjet printhead
4.2.3 Mirror chips

[updated 12.03.2020]
Teaching methods/Media:
Lectures using PowerPoint presentations incl. video sequences, especially for selected manufacturing processes and components.

[updated 12.03.2020]
Recommended or required reading:
Boussey, Jumana: Microsystems Technology: Fabrication, Test and Reliability, Kogan Page Science, 2003, ISBN 978-1903996478
Francis, Laurent A.; Iniewski, Krzysztof: Novel Advances in Microsystems Technologies and Their Applications, CRC Press, 2017, Reprint, ISBN 978-1138072794
Madou, Marc J.: Fundamentals of Microfabrication, CRC Press, 1997, ISBN 0-8493-9451-1
Menz, Wolfgang; Mohr, Jürgen; Paul, Oliver: Microsystem Technology, Wiley-VCH, 2001, ISBN 978-3527296347

[updated 18.07.2019]
[Mon Jun  1 02:53:17 CEST 2020, CKEY=nemNE2103.MST, BKEY=nem, CID=NE2103.MST, LANGUAGE=en, DATE=01.06.2020]